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Haoran Wen
Haoran Wen
Director of MEMS, StethX Microsystems Inc.
Verified email at stethx.com
Title
Cited by
Cited by
Year
A review of the Hénon map and its physical interpretations
H Wen
School of Physics Georgia Institute of Technology, Atlanta, GA, 2014
412014
Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes
B Hamelin, J Yang, A Daruwalla, H Wen, F Ayazi
Scientific reports 9 (1), 18698, 2019
352019
Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units
H Wen, A Daruwalla, F Ayazi
Microsystems & nanoengineering 3, 16092, 2017
352017
An FPGA-Based Interface System for High Frequency Bulk-Acoustic-Wave (BAW) Micro-Gyroscopes with In-Run Automatic Mode-Matching
C Li, H Wen, S Wisher, A Norouzpour-Shirazi, J Lei, H Chen, F Ayazi
IEEE Transactions on Instrumentation and Measurement, 2019
332019
Substrate-decoupled silicon disk resonators having degenerate gyroscopic modes with Q in excess of 1-million
R Mirjalili, H Wen, DE Serrano, F Ayazi
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
302015
Detection of pathological mechano-acoustic signatures using precision accelerometer contact microphones in patients with pulmonary disorders
P Gupta, H Wen, L Di Francesco, F Ayazi
Scientific Reports 11 (1), 13427, 2021
252021
Wafer-level-packaged HARPSS+ MEMS platform: Integration of robust timing and inertial measurement units (TIMU) on a single chip
H Wen, A Daruwalla, Y Jeong, P Gupta, J Choi, CS Liu, F Ayazi
2018 IEEE/ION Position, Location and Navigation Symposium (PLANS), 261-266, 2018
232018
A High-Frequency Resonant Framed-Annulus Pitch or Roll Gyroscope for Robust High-Performance Single-Chip Inertial Measurement Units
H Wen, A Daruwalla, CS Liu, F Ayazi
Journal of Microelectromechanical Systems 27 (6), 995-1008, 2018
212018
A high-performance single-chip timing and inertial measurement unit with robust mode-matched gyroscopes
H Wen, A Daruwalla, Y Jeong, P Gupta, J Choi, C Liu, F Ayazi
Micro Electro Mechanical Systems (MEMS), 2018 IEEE, 105-108, 2018
202018
A Hermetically-Sealed 2.9MHz Disk BAW Gyroscope with Sub-Degree-Per-Hour Bias Instability
H Wen, A Daruwalla, CS Liu, F Ayazi
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
192020
An out-of-plane" hinge-shaped" nano-gap accelerometer with high sensitivity and wide bandwidth
Y Jeong, A Daruwalla, H Wen, F Ayazi
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
192017
Low motional impedance distributed lamé mode resonators for high frequency timing applications
A Daruwalla, H Wen, CS Liu, F Ayazi
Microsystems & Nanoengineering 6 (1), 53, 2020
162020
A digital force-to-rebalance scheme for high-frequency bulk-acoustic-wave micro-gyroscopes
C Li, H Wen, H Chen, F Ayazi
Sensors and Actuators A: Physical 313, 112181, 2020
132020
Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes
H Wen
Springer Nature, 2019
132019
Toward inertial-navigation-on-chip: The physics and performance scaling of multi degree-of-freedom resonant MEMS gyroscopes
H Wen
Georgia Institute of Technology, 2018
132018
HARPSS-fabricated nano-gap comb-drive for efficient linear actuation of high frequency BAW resonators
H Wen, A Daruwalla, R Mirjalili, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
122016
A dual-axis resonant accelerometer based on electrostatic stiffness modulation in epi-seal process
S Shin, H Wen, HK Kwon, GD Vukasin, TW Kenny, F Ayazi
2019 IEEE SENSORS, 1-4, 2019
112019
Epitaxially-grown thick polysilicon for baw disk resonator gyroscopes with very low dissipation
A Daruwalla, H Wen, R Mirjalili, F Ayazi
2018 IEEE Micro Electro Mechanical Systems (MEMS), 1008-1011, 2018
112018
Distributed Lamé mode resonators for temperature-stable high frequency MEMS oscillators
A Daruwalla, CS Liu, H Wen, F Ayazi
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
102017
A piezoelectric resonant accelerometer for above 140db linear dynamic range high-G applications
S Shin, A Daruwalla, M Gong, H Wen, F Ayazi
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
92019
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