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Costas Spanos
Costas Spanos
Professor of Electrical Engineering and Computer Sciences, University of California, Berkeley
Verified email at berkeley.edu
Title
Cited by
Cited by
Year
Fundamentals of semiconductor manufacturing and process control
GS May, CJ Spanos
John Wiley & Sons, 2006
5052006
Modeling within-die spatial correlation effects for process-design co-optimization
P Friedberg, Y Cao, J Cain, R Wang, J Rabaey, C Spanos
Sixth international symposium on quality electronic design (isqed'05), 516-521, 2005
2742005
Maintenance unit for a sensor apparatus
ML Freed, RS Mundt, CJ Spanos
US Patent 7,282,889, 2007
266*2007
Specular spectroscopic scatterometry
X Niu, N Jakatdar, J Bao, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 14 (2), 97-111, 2001
2082001
Towards efficient data valuation based on the shapley value
R Jia, D Dao, B Wang, FA Hubis, N Hynes, NM Gürel, B Li, C Zhang, ...
The 22nd International Conference on Artificial Intelligence and Statistics …, 2019
1862019
Distributed energy consumption control via real-time pricing feedback in smart grid
K Ma, G Hu, CJ Spanos
IEEE Transactions on Control Systems Technology 22 (5), 1907-1914, 2014
1832014
Model-based fault detection and identification for switching power converters
J Poon, P Jain, IC Konstantakopoulos, C Spanos, SK Panda, SR Sanders
IEEE Transactions on Power Electronics 32 (2), 1419-1430, 2016
1782016
Microgrid to enable optimal distributed energy retail and end-user demand response
M Jin, W Feng, C Marnay, C Spanos
Applied Energy 210, 1321-1335, 2018
1562018
Real-time statistical process control using tool data (semiconductor manufacturing)
CJ Spanos, HF Guo, A Miller, J Levine-Parrill
IEEE Transactions on Semiconductor Manufacturing 5 (4), 308-318, 1992
1491992
MOD-DR: Microgrid optimal dispatch with demand response
M Jin, W Feng, P Liu, C Marnay, C Spanos
Applied energy 187, 758-776, 2017
1472017
Accurate indoor localization and tracking using mobile phone inertial sensors, WiFi and iBeacon
H Zou, Z Chen, H Jiang, L Xie, C Spanos
2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017
1452017
Measurement and analysis of variability in 45 nm strained-Si CMOS technology
LT Pang, K Qian, CJ Spanos, B Nikolic
IEEE Journal of Solid-State Circuits 44 (8), 2233-2243, 2009
1432009
A digital twin approach for fault diagnosis in distributed photovoltaic systems
P Jain, J Poon, JP Singh, C Spanos, SR Sanders, SK Panda
IEEE Transactions on Power Electronics 35 (1), 940-956, 2019
1392019
WinIPS: WiFi-based non-intrusive indoor positioning system with online radio map construction and adaptation
H Zou, M Jin, H Jiang, L Xie, CJ Spanos
IEEE Transactions on Wireless Communications 16 (12), 8118-8130, 2017
1372017
Statistical experimental design in plasma etch modeling
GS May, J Huang, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 4 (2), 83-98, 1991
1361991
WinLight: A WiFi-based occupancy-driven lighting control system for smart building
H Zou, Y Zhou, H Jiang, SC Chien, L Xie, CJ Spanos
Energy and Buildings 158, 924-938, 2018
1322018
A data-driven strategy for detection and diagnosis of building chiller faults using linear discriminant analysis
D Li, G Hu, CJ Spanos
Energy and Buildings 128, 519-529, 2016
1262016
Specular spectroscopic scatterometry in DUV lithography
X Niu, NH Jakatdar, J Bao, CJ Spanos, SK Yedur
Metrology, Inspection, and Process Control for Microlithography XIII 3677 …, 1999
1251999
Semiconductor yield improvement: results and best practices
SP Cunningham, CJ Spanos, K Voros
IEEE Transactions on Semiconductor Manufacturing 8 (2), 103-109, 1995
1211995
Personal thermal comfort models with wearable sensors
S Liu, S Schiavon, HP Das, M Jin, CJ Spanos
Building and Environment 162, 106281, 2019
1202019
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