Costas Spanos
Costas Spanos
Professor of Electrical Engineering and Computer Sciences, University of California, Berkeley
Verified email at berkeley.edu
TitleCited byYear
Fundamentals of semiconductor manufacturing and process control
GS May, CJ Spanos
IEEE, 2006
3822006
Maintenance unit for a sensor apparatus
ML Freed, RS Mundt, CJ Spanos
US Patent 7,282,889, 2007
257*2007
Modeling within-die spatial correlation effects for process-design co-optimization
P Friedberg, Y Cao, J Cain, R Wang, J Rabaey, C Spanos
Sixth international symposium on quality electronic design (isqed'05), 516-521, 2005
2502005
Specular spectroscopic scatterometry
X Niu, N Jakatdar, J Bao, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 14 (2), 97-111, 2001
1922001
Measurement and analysis of variability in 45 nm strained-Si CMOS technology
LT Pang, K Qian, CJ Spanos, B Nikolic
IEEE Journal of Solid-State Circuits 44 (8), 2233-2243, 2009
1332009
Real-time statistical process control using tool data (semiconductor manufacturing)
CJ Spanos, HF Guo, A Miller, J Levine-Parrill
IEEE Transactions on Semiconductor Manufacturing 5 (4), 308-318, 1992
1331992
Statistical experimental design in plasma etch modeling
GS May, J Huang, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 4 (2), 83-98, 1991
1321991
Distributed energy consumption control via real-time pricing feedback in smart grid
K Ma, G Hu, CJ Spanos
IEEE Transactions on Control Systems Technology 22 (5), 1907-1914, 2014
1312014
Specular spectroscopic scatterometry in DUV lithography
X Niu, NH Jakatdar, J Bao, CJ Spanos, SK Yedur
Metrology, Inspection, and Process Control for Microlithography XIII 3677 …, 1999
1161999
Semiconductor yield improvement: results and best practices
SP Cunningham, CJ Spanos, K Voros
IEEE Transactions on Semiconductor Manufacturing 8 (2), 103-109, 1995
1161995
Statistical equipment modeling for VLSI manufacturing: An application for LPCVD
KK Lin, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 3 (4), 216-229, 1990
991990
Statistical process control in semiconductor manufacturing
CJ Spanos
Proceedings of the IEEE 80 (6), 819-830, 1992
891992
Gate line edge roughness model for estimation of FinFET performance variability
K Patel, TJK Liu, CJ Spanos
IEEE Transactions on Electron Devices 56 (12), 3055-3063, 2009
862009
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
ML Freed, RS Mundt, CJ Spanos
US Patent 6,691,068, 2004
862004
MOD-DR: Microgrid optimal dispatch with demand response
M Jin, W Feng, P Liu, C Marnay, C Spanos
Applied Energy 187, 758-776, 2017
782017
A control system for photolithographic sequences
S Leang, SY Ma, J Thomson, BJ Bombay, CJ Spanos
IEEE transactions on semiconductor manufacturing 9 (2), 191-207, 1996
731996
Model-based fault detection and identification for switching power converters
J Poon, P Jain, IC Konstantakopoulos, C Spanos, SK Panda, SR Sanders
IEEE Transactions on Power Electronics 32 (2), 1419-1430, 2016
702016
Use of short-loop electrical measurements for yield improvement
C Yu, T Maung, CJ Spanos, DS Boning, JE Chung, HY Liu, KJ Chang, ...
IEEE transactions on semiconductor manufacturing 8 (2), 150-159, 1995
691995
Virtual metrology modeling for plasma etch operations
D Zeng, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 22 (4), 419-431, 2009
672009
Parameter extraction for statistical IC process characterization
CJ Spanos, SW Director
IEEE transactions on computer-aided design of integrated circuits and …, 1986
651986
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