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Prem Panneerchelvam
Prem Panneerchelvam
Research Scientist at KLA
Verified email at utexas.edu
Title
Cited by
Cited by
Year
A study of the counter rotating vortex rings interacting with the primary vortex ring in shock tube generated flows
T Murugan, S De, CL Dora, D Das, PP Kumar
Fluid Dynamics Research 45 (2), 025506, 2013
392013
Computational modeling of a single microdischarge and its interactions with high frequency electromagnetic waves
P PanneerChelvam, LL Raja, RR Upadhyay
Journal of Physics D: Applied Physics 49 (34), 345501, 2016
182016
Modeling of thermalization phenomena in coaxial plasma accelerators
V Subramaniam, P Panneerchelvam, LL Raja
Journal of Physics D: Applied Physics 51 (21), 215203, 2018
142018
Modeling of gas breakdown and early transients of plasma evolution in cylindrical all-dielectric resonators
PP Chelvam, LL Raja
Journal of Physics D: Applied Physics 50 (47), 474003, 2017
122017
Computational modeling of the effect of external electron injection into a direct-current microdischarge
PK Panneer Chelvam, LL Raja
Journal of Applied Physics 118 (24), 243301, 2015
112015
Trilayer hardmask lithography and etch for BEOL manufacturing
P Panneerchelvam, CM Huard, A Agarwal, AV Pret, A Mani, R Gronheid, ...
Metrology, Inspection, and Process Control XXXVI 12053, 628-634, 2022
62022
Evolution of lithography-to-etch bias in multi-patterning processes
P Panneerchelvam, A Agarwal, CM Huard, AV Pret, A Mani, R Gronheid, ...
Journal of Vacuum Science & Technology B 40 (6), 062601, 2022
42022
System and method to adjust a kinetics model of surface reactions during plasma processing
A Agarwal, C Huard, Y Zhang, H Pu, X Li, P Panneerchelvam, F Han, ...
US Patent 11,966,203, 2024
32024
Effective Preconditioners for Maxwell's equations on Unstructured Grids for Coupled Plasma-EM Wave Modeling
PK Panneer Chelvam, LL Raja
55th AIAA Aerospace Sciences Meeting, 0844, 2017
32017
Process optimization for shallow trench isolation etch using computational models
S Huang, P Panneerchelvam, CM Huard, S Sridhar, PLG Ventzek, ...
Journal of Vacuum Science & Technology A 41 (5), 2023
12023
On the origin and evolution of hotspots in multipatterning processes
P Panneerchelvam, CM Huard, T Graves, AV Pret, R Gronheid, A Agarwal, ...
Journal of Vacuum Science & Technology B 41 (4), 2023
12023
Computational modeling of electromagnetic waves and their interactions with microplasmas
PK Panneer Chelvam
12017
Computational modeling of electromagnetic waves and their interactions with microplasmas
PKP Chelvam
University of Texas, 2017
12017
Computational modeling of the effect of external electron injection into a DC microdischarge
P Panneerchelvam, LL Raja
12016
Plasma hypermodel integrated with feature-scale profile model for accelerated etch process development
C Huard, P Panneerchelvam, S Huang, MD Smith
US Patent App. 17/982,472, 2024
2024
Systems and methods for setting up a physics-based model
C Huard, P Panneerchelvam, G Parsey, A Agarwal
US Patent App. 17/959,712, 2023
2023
Characterization of Inductively Coupled Plasma Source for Plasma Enhanced Atomic Layer Deposition
P Panneerchelvam, A Agarwal, DR Boris, SG Walton
AVS Symposium 2018, 2018
2018
Collaborative Research: Fundamental studies of plasma control using surface embedded electronic devices
LL Raja, PK PanneerChelvam, D Levko
Univ. of Texas, Austin, TX (United States), 2016
2016
Harmonic generation of microwave frequencies in plasmas
P PanneerChelvam, LL Raja
APS Annual Gaseous Electronics Meeting Abstracts, PR2. 004, 2015
2015
Computational modeling of electron injection in an Argon microdischarge with DC source
P Panneerchelvam, LL Raja
8th International conference on microplasmas, 2015
2015
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Articles 1–20