Fundamental aspects and applications of electrochemical microfabrication M Datta, D Landolt Electrochimica acta 45 (15-16), 2535-2558, 2000 | 484 | 2000 |
Electroless method of seed layer depostion, repair, and fabrication of Cu interconnects M Datta, V Dubin, C Thomas, P McGregor US Patent App. 09/728,683, 2002 | 476 | 2002 |
Electrochemical metal removal technique for planarization of surfaces M Datta, TR O'toole US Patent 5,567,300, 1996 | 295 | 1996 |
Electrochemical machining under pulsed current conditions M Datta, D Landolt Electrochimica Acta 26 (7), 899-907, 1981 | 232 | 1981 |
Electrochemical tool for uniform metal removal during electropolishing M Datta, LT Romankiw US Patent 5,217,586, 1993 | 205 | 1993 |
Barrier layers for electroplated SnPb eutectic solder joints PC Andricacos, M Datta, WJ Horkans, SK Kang, KT Kwietniak US Patent 5,937,320, 1999 | 196 | 1999 |
Energy storage systems in electronics T Osaka, M Datta CRC Press, 2000 | 171 | 2000 |
Copper-containing C4 ball-limiting metallurgy stack for enhanced reliability of packaged structures and method of making same M Datta, D Emory, SM Joshi, S Menezes, D Suh US Patent 6,853,076, 2005 | 161 | 2005 |
Apparatus and method for the electrochemical etching of a wafer M Datta, DC Edelstein, CE Uzoh US Patent 6,103,096, 2000 | 156 | 2000 |
On the role of mass transport in high rate dissolution of iron and nickel in ECM electrolytes—I. Chloride solutions M Datta, D Landolt Electrochimica Acta 25 (10), 1255-1262, 1980 | 156 | 1980 |
Application of chemical and electrochemical micromachining in the electronics industry M Datta, LT Romankiw Journal of the Electrochemical Society 136 (6), 285C, 1989 | 151 | 1989 |
Microfabrication by electrochemical metal removal M Datta IBM Journal of Research and Development 42 (5), 655-670, 1998 | 148 | 1998 |
Anodic dissolution of metals at high rates M Datta IBM Journal of Research and Development 37 (2), 207-226, 1993 | 139 | 1993 |
Thickness of natural oxide films determined by AES and XPS with/without sputtering HJ Mathieu, M Datta, D Landolt Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 3 (2 …, 1985 | 139 | 1985 |
Electroetching method and apparatus M Datta, RV Shenoy US Patent 5,543,032, 1996 | 137 | 1996 |
Electrochemical micromachining: An environmentally friendly, high speed processing technology M Datta, D Harris Electrochimica Acta 42 (20-22), 3007-3013, 1997 | 129 | 1997 |
Flip-chip interconnections using lead-free solders PC Andricacos, M Datta, H Deligianni, WJ Horkans, SK Kang, ... US Patent 6,224,690, 2001 | 125 | 2001 |
Microelectronic packaging M Datta, T Osaka, JW Schultze CRC press, 2004 | 124 | 2004 |
Fabrication of an array of precision nozzles by through‐mask electrochemical micromachining M Datta Journal of the Electrochemical Society 142 (11), 3801, 1995 | 110 | 1995 |
Jet and laser‐jet electrochemical micromachining of nickel and steel M Datta, LT Romankiw, DR Vigliotti, RJ Von Gutfeld Journal of the Electrochemical Society 136 (8), 2251, 1989 | 101 | 1989 |