| High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient W Wang, PM Mayrhofer, X He, M Gillinger, Z Ye, X Wang, A Bittner, ... Applied physics letters 105 (13), 2014 | 116 | 2014 |
| Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode M Kucera, E Wistrela, G Pfusterschmied, V Ruiz-Díez, T Manzaneque, ... Sensors and Actuators B: Chemical 200, 235-244, 2014 | 70 | 2014 |
| c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes A Ababneh, M Alsumady, H Seidel, T Manzaneque, J Hernando-García, ... Applied Surface Science 259, 59-65, 2012 | 58 | 2012 |
| The porosification of fired LTCC substrates by applying a wet chemical etching procedure A Bittner, U Schmid Journal of the European Ceramic Society 29 (1), 99-104, 2009 | 52 | 2009 |
| Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes M Kucera, E Wistrela, G Pfusterschmied, V Ruiz-Díez, T Manzaneque, ... Applied Physics Letters 104 (23), 2014 | 51 | 2014 |
| Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films M Schneider, A Bittner, F Patocka, M Stöger-Pollach, E Halwax, U Schmid Applied Physics Letters 101 (22), 2012 | 50 | 2012 |
| Circular test structure for the determination of piezoelectric constants of ScxAl1− xN thin films applying Laser Doppler Vibrometry and FEM simulations PM Mayrhofer, H Euchner, A Bittner, U Schmid Sensors and actuators A: Physical 222, 301-308, 2015 | 41 | 2015 |
| The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1− xN thin films PM Mayrhofer, C Eisenmenger-Sittner, M Stöger-Pollach, H Euchner, ... Journal of Applied Physics 115 (19), 2014 | 39 | 2014 |
| Arrays of open, independently tunable microcavities C Derntl, M Schneider, J Schalko, A Bittner, J Schmiedmayer, U Schmid, ... Optics express 22 (18), 22111-22120, 2014 | 38 | 2014 |
| Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates A Bittner, A Ababneh, H Seidel, U Schmid Applied surface science 257 (3), 1088-1091, 2010 | 35 | 2010 |
| Fundamental properties of a-SiNx: H thin films deposited by ICP-PECVD for MEMS applications D Dergez, J Schalko, A Bittner, U Schmid Applied surface science 284, 348-353, 2013 | 34 | 2013 |
| Design, fabrication and testing of a piezoelectric energy microgenerator AB Alamin Dow, A Bittner, U Schmid, NP Kherani Microsystem technologies 20, 1035-1040, 2014 | 33 | 2014 |
| Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loop M Kucera, T Manzaneque, JL Sánchez-Rojas, A Bittner, U Schmid Journal of Micromechanics and Microengineering 23 (8), 085009, 2013 | 33 | 2013 |
| Thickness dependence of Young's modulus and residual stress of sputtered aluminum nitride thin films M Schneider, A Bittner, U Schmid Applied Physics Letters 105 (20), 2014 | 23 | 2014 |
| Lock-in amplifier powered analogue Q-control circuit for self-actuated self-sensing piezoelectric MEMS resonators M Kucera, F Hofbauer, E Wistrela, T Manzaneque, V Ruiz-Díez, ... Microsystem technologies 20, 615-625, 2014 | 23 | 2014 |
| Modeling the performance of a micromachined piezoelectric energy harvester AB Alamin Dow, M Schneider, D Koo, HA Al-Rubaye, A Bittner, U Schmid, ... Microsystem technologies 18, 1035-1043, 2012 | 21 | 2012 |
| Electromigration resistance and long term stability of textured silver thin films on LTCC A Bittner, H Seidel, U Schmid Microelectronic engineering 88 (1), 127-130, 2011 | 21 | 2011 |
| A permittivity characterization method by detuned ring-resonators for bulk materials up to 110 GHz A Talai, F Steinhäußer, A Bittner, U Schmid, R Weigel, A Koelpin 2014 44th European Microwave Conference, 124-127, 2014 | 15 | 2014 |
| Influence of c-axis orientation and scandium concentration on infrared active modes of magnetron sputtered ScxAl1− xN thin films PM Mayrhofer, C Eisenmenger-Sittner, H Euchner, A Bittner, U Schmid Applied Physics Letters 103 (25), 2013 | 11 | 2013 |
| High‐frequency characterization of porous low‐temperature cofired ceramics substrates A Bittner, H Seidel, U Schmid Journal of the American Ceramic Society 93 (11), 3778-3781, 2010 | 11 | 2010 |
Seidel, HelmutProfessor für Mikromechanik, Mikrofluidik/Mikroaktorik, Saarland UniversityVerified email at lmm.uni-saarland.de
