Karl K. Berggren
Karl K. Berggren
Professor of Electrical Engineering, MIT
Verified email at mit.edu - Homepage
TitleCited byYear
Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates
I Bita, JKW Yang, YS Jung, CA Ross, EL Thomas, KK Berggren
Science 321 (5891), 939-943, 2008
7942008
Using light as a lens for submicron, neutral-atom lithography
G Timp, RE Behringer, DM Tennant, JE Cunningham, M Prentiss, ...
Physical review letters 69 (11), 1636, 1992
5481992
Nanowire single-photon detector with an integrated optical cavity and anti-reflection coating
KM Rosfjord, JKW Yang, EA Dauler, AJ Kerman, V Anant, BM Voronov, ...
Optics Express 14 (2), 527-534, 2006
4342006
Kinetic-inductance-limited reset time of superconducting nanowire photon counters
AJ Kerman, EA Dauler, WE Keicher, JKW Yang, KK Berggren, ...
Applied physics letters 88 (11), 111116, 2006
4272006
Mach-Zehnder interferometry in a strongly driven superconducting qubit
WD Oliver, Y Yu, JC Lee, KK Berggren, LS Levitov, TP Orlando
Science 310 (5754), 1653-1657, 2005
3992005
Microcontact printing on surfaces and derivative articles
GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ...
US Patent 6,180,239, 2001
3322001
Methods of etching articles via microcontact printing
GM Whitesides, Y Xia, JL Wilbur, RJ Jackman, E Kim, MG Prentiss, ...
US Patent 5,900,160, 1999
3221999
Microlithography by using neutral metastable atoms and self-assembled monolayers
KK Berggren, A Bard, JL Wilbur, JD Gillaspy, AG Helg, JJ McClelland, ...
Science 269 (5228), 1255-1257, 1995
3151995
Localization of metastable atom beams with optical standing waves: nanolithography at the Heisenberg limit
KS Johnson, JH Thywissen, NH Dekker, KK Berggren, AP Chu, ...
Science 280 (5369), 1583-1586, 1998
2991998
Resolution limits of electron-beam lithography toward the atomic scale
VR Manfrinato, L Zhang, D Su, H Duan, RG Hobbs, EA Stach, ...
Nano letters 13 (4), 1555-1558, 2013
2842013
Complex self-assembled patterns using sparse commensurate templates with locally varying motifs
JKW Yang, YS Jung, JB Chang, RA Mickiewicz, A Alexander-Katz, ...
Nature nanotechnology 5 (4), 256, 2010
2482010
A path to ultranarrow patterns using self-assembled lithography
YS Jung, JB Chang, E Verploegen, KK Berggren, CA Ross
Nano Letters 10 (3), 1000-1005, 2010
2482010
Using high-contrast salty development of hydrogen silsesquioxane for sub-10‐nm half-pitch lithography
JKW Yang, KK Berggren
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
2192007
Templating three-dimensional self-assembled structures in bilayer block copolymer films
AT KG, KW Gotrik, AF Hannon, A Alexander-Katz, CA Ross, KK Berggren
Science 336 (6086), 1294-1298, 2012
2162012
On-chip detection of non-classical light by scalable integration of single-photon detectors
F Najafi, J Mower, NC Harris, F Bellei, A Dane, C Lee, X Hu, P Kharel, ...
Nature communications 6, 5873, 2015
1962015
781 Mbit/s photon-counting optical communications using a superconducting nanowire detector
BS Robinson, AJ Kerman, EA Dauler, RJ Barron, DO Caplan, ML Stevens, ...
Optics letters 31 (4), 444-446, 2006
1912006
Constriction-limited detection efficiency of superconducting nanowire single-photon detectors
AJ Kerman, EA Dauler, JKW Yang, KM Rosfjord, V Anant, KK Berggren, ...
Applied Physics Letters 90 (10), 101110, 2007
1892007
Modeling the electrical and thermal response of superconducting nanowire single-photon detectors
JKW Yang, AJ Kerman, EA Dauler, V Anant, KM Rosfjord, KK Berggren
IEEE transactions on applied superconductivity 17 (2), 581-585, 2007
1832007
Single-photon detectors based on ultranarrow superconducting nanowires
F Marsili, F Najafi, E Dauler, F Bellei, X Hu, M Csete, RJ Molnar, ...
Nano letters 11 (5), 2048-2053, 2011
1732011
Understanding of hydrogen silsesquioxane electron resist for sub--half-pitch lithography
JKW Yang, B Cord, H Duan, KK Berggren, J Klingfus, SW Nam, KB Kim, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009
1722009
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Articles 1–20