Stephen A. Campbell
Stephen A. Campbell
Verified email at
Cited by
Cited by
The science and engineering of microelectronic fabrication
SA Campbell
(No Title), 2001
The big picture on nanomedicine: the state of investigational and approved nanomedicine products
ML Etheridge, SA Campbell, AG Erdman, CL Haynes, SM Wolf, ...
Nanomedicine: nanotechnology, biology and medicine 9 (1), 1-14, 2013
MOSFET transistors fabricated with high permitivity TiO/sub 2/dielectrics
SA Campbell, DC Gilmer, XC Wang, MT Hsieh, HS Kim, WL Gladfelter, ...
IEEE Transactions on Electron Devices 44 (1), 104-109, 1997
Titanium dioxide (TiO 2)-based gate insulators
SA Campbell, HS Kim, DC Gilmer, B He, T Ma, WL Gladfelter
IBM journal of research and development 43 (3), 383-392, 1999
Fabrication engineering at the micro-and nanoscale
SA Campbell
(No Title), 2008
Chemical vapour deposition of the oxides of titanium, zirconium and hafnium for use as high‐k materials in microelectronic devices. A carbon‐free precursor for the …
RC Smith, T Ma, N Hoilien, LY Tsung, MJ Bevan, L Colombo, J Roberts, ...
Advanced Materials for Optics and Electronics 10 (3‐5), 105-114, 2000
Imaging and phase identification of Cu2ZnSnS4 thin films using confocal Raman spectroscopy
AJ Cheng, M Manno, A Khare, C Leighton, SA Campbell, ES Aydil
Journal of Vacuum Science & Technology A 29 (5), 2011
Doping efficiency, dopant location, and oxidation of Si nanocrystals
XD Pi, R Gresback, RW Liptak, SA Campbell, U Kortshagen
Applied Physics Letters 92 (12), 2008
Internal photoemission of electrons and holes from (100)Si into
VV Afanas’ ev, A Stesmans, F Chen, X Shi, SA Campbell
Applied Physics Letters 81 (6), 1053-1055, 2002
An oxidation-resistant indium tin oxide catalyst support for proton exchange membrane fuel cells
H Chhina, S Campbell, O Kesler
Journal of Power Sources 161 (2), 893-900, 2006
Leakage current and electrical breakdown in metal‐organic chemical vapor deposited TiO2 dielectrics on silicon substrates
HS Kim, DC Gilmer, SA Campbell, DL Polla
Applied Physics Letters 69 (25), 3860-3862, 1996
The impact of genetic counselling about breast cancer risk on women’s risk perceptions and levels of distress
A Cull, EDC Anderson, S Campbell, J Mackay, E Smyth, M Steel
British journal of cancer 79 (3), 501-508, 1999
Does chemistry really matter in the chemical vapor deposition of titanium dioxide? Precursor and kinetic effects on the microstructure of polycrystalline films
CJ Taylor, DC Gilmer, DG Colombo, GD Wilk, SA Campbell, J Roberts, ...
Journal of the American Chemical Society 121 (22), 5220-5229, 1999
Air-stable full-visible-spectrum emission from silicon nanocrystals synthesized by an all-gas-phase plasma approach
XD Pi, RW Liptak, JD Nowak, NP Wells, CB Carter, SA Campbell, ...
Nanotechnology 19 (24), 245603, 2008
Anhydrous metal nitrates as volatile single source precursors for the CVD of metal oxide films
DG Colombo, DC Gilmer, VG Young Jr, SA Campbell, WL Gladfelter
Chemical Vapor Deposition 4 (6), 220-222, 1998
Structural and electrical characterization of TiO2 grown from titanium tetrakis‐isopropoxide (TTIP) and TTIP/H2O ambients
J Yan, DC Gilmer, SA Campbell, WL Gladfelter, PG Schmid
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
Approaching nanoxerography: The use of electrostatic forces to position nanoparticles with 100 nm scale resolution
HO Jacobs, SA Campbell, MG Steward
Advanced Materials 14 (21), 1553-1557, 2002
Plasma synthesis of single-crystal silicon nanoparticles for novel electronic device applications
A Bapat, C Anderson, CR Perrey, CB Carter, SA Campbell, U Kortshagen
Plasma physics and controlled fusion 46 (12B), B97, 2004
Room-temperature atmospheric oxidation of Si nanocrystals after HF etching
XD Pi, L Mangolini, SA Campbell, U Kortshagen
Physical Review B 75 (8), 085423, 2007
A study of mixtures of HfO2 and TiO2 as high-k gate dielectrics
F Chen, X Bin, C Hella, X Shi, WL Gladfelter, SA Campbell
Microelectronic Engineering 72 (1-4), 263-266, 2004
The system can't perform the operation now. Try again later.
Articles 1–20